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Comparison ledger

120 Continuousversus6 AI-DC 6

Lapmaster 120 Continuous, Strasbaugh 6 AI-DC 6, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
6 AI-DC 6Strasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousStrasbaugh 6 AI-DC 6
Specifications
Manufacturer—Strasbaugh[1]
Model—6 AI-DC 6[1]
Tool type—Polisher[2]
Category—CMP[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com