Comparison ledger
Lapmaster 15 Lapper, Strasbaugh 6 DS SP Planarizer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 15 LapperLapmaster | 6 DS SP PlanarizerStrasbaugh |
|---|---|---|
| OEM | Lapmaster | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lapmaster 15 | Strasbaugh 6 DS SP Planarizer |
| Specifications | ||
| Number Of Conditioning Rings | Up to 3[1] | — |
| Ring ID | Up to 5.5″[1] | — |
| Plate Diameter – Outside | 15″[1] | — |
| Plate Diameter – Inside | 3 1/2″[1] | — |
| Standard RPM | 60[1] | — |
| Drive Motor | 1/2 HP[1] | — |
| Electrics | 110V / 1Ph / 60Hz[1] | — |
| Dimensions – Approximate | 26″(L-R) x 21″(F-B) x 22″(H)[1] | — |
| Configuration | Equipped with:[1] | 4 cassettes inside the tool (2 sender, 2 receiver)[3] |
| Equipped with: 15″ Cast Iron Plate | Included[1] | — |
| Equipped with: (3) Yoke/Roller Bearing Assemblies | Included[1] | — |
| Equipped with: (3) Conditioning Rings | Included[1] | — |
| Equipped with: (3) Hold Downs | Included[1] | — |
| Equipped with: 30 Minute Timer | Included[1] | — |
| Wafer compatibility | — | 4", 6", 8"[2] |
| Throughput | — | 7 wafer/hour for 800sec of polishing / wafer[2] |
| Loader unit type | — | Carrier Entegris PA 194-60MB-61C02[2] |
| Number of cassettes | — | 2 lots at the same time / 4 cassettes inside the tool (2 sender, 2 receiver)[2] |
| Nominal wafer size | — | 6 inch[2] |