Waferpedia

Comparison ledger

48versus48 AB Air Bearing Opticalversus48 Optical

Lapmaster 48, Lapmaster 48 AB Air Bearing Optical, Lapmaster 48 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
48Lapmaster
48 OpticalLapmaster
OEMLapmasterLapmasterLapmaster
Category—CMPCMP
Wafer size———
Process node———
Introduced———
Production run———
Lifecycle———
Lifecycle milestones———
Control system———
Generation———
FamilyLapmaster 48Lapmaster 48Lapmaster 48
Cited variants——
Specifications
Machine typeFloor-standing single-sided machinery[2]——
Lapping plate diameter48 inches (1219 mm)[2]——
Lapping plate materialCast iron[2]——
No. of conditioning rings4[2]——
Drive motor7.5 kW[2]——
Weight3357 kg[2]——
Shipping weight3748 kg[2]——
Standard lap plate speed48 rpm[1]——
Lapping plate O.D.48 inches (1219 mm)[1]——
Lapping plate I.D.13 inches (330 mm)[1]——
Conditioning ring O.D.20 inches (508 mm)[1]——
Conditioning ring I.D.17 inches (432 mm)[1]——
Power supply230 V/460 V, 3 phase, 60 Hz[1]——
Polishing plateØ 48 inch (1219 mm) cast iron polishing plate[3]——
VersionsOpen face (OF) and pneumatic lift (PL)[3]——
Motor10 hp / 7.5 kW; pneumatic lift version: 14.75 hp / 11 kW[3]——
Phase—3 Phase[4]3 Phase[5]
Voltage—230V[4]208V[5]
Frequency—60Hz[4]60Hz[5]
Configuration—30amps[4]—
Current—30amps[4]—
Sources (5)Every fact above is drawn from these public sources
  1. [1]catalog.lapmaster.comcatalog.lapmaster.com
  2. [2]catalog.lapmaster.comcatalog.lapmaster.com
  3. [3]lapmaster-wolters.co.uklapmaster-wolters.co.uk
  4. [4]inventory listing
  5. [5]inventory listing