Comparison ledger
Perkin Elmer 2400, Perkin Elmer 2400 8 L, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2400Perkin Elmer | 2400 8 LPerkin Elmer |
|---|---|---|
| OEM | Perkin Elmer | Perkin Elmer |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Perkin Elmer 2400 | Perkin Elmer 2400 |
| Specifications | ||
| Configuration | Cryopump included[1] | RF 20S power supply[3] |
| Type | Sputtering tool[1] | — |
| Cathodes | 2 round cathodes[2] | — |
| MFC | 1 MFC[2] | — |
| Vacuum level | 2-10 millitorr[2] | — |
| Control system | New programmable HMI / PLC system[2] | — |
| Cryopump | Rebuilt CTI 8 cryopump with compressor and lines[2] | — |
| Mechanical pump | Rebuilt dual stage mechanical pump[2] | — |
| Electronics | New electronics[2] | — |
| Cryopump included | Cryopump included[1] | — |
| Dry pump | No dry pump[1] | — |
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