Waferpedia

Comparison ledger

SS 3000 ARversus1000FP

SCREEN SS 3000 AR, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMSCREENYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySCREEN SS 3000YES 1000FP
Cited variants
  • SCREEN / DNS SS 3000 AR - 4 Back - Includes HDD[1]
  • SCREEN / DNS SS 3000 AR Scrubber - 2F/2B - Including HDD[2]
  • SCREEN / DNS SS 3000 AR Scrubber - Not including HDD[3]
  • SCREEN / DNS SS 3000 AR Scrubber - No HDD[4]
—
Specifications
Configuration4 Back[1]—
ModelSS 3000 AR[1]Glen/YES 1000FP[5]
OEMSCREEN / DNS[1]—
TypeScrubber[2]—
System type—Plasma cleaning system[5]
Line—R-Series Plasma Cleaning Systems (Glen Technologies)[5]
Designed use—Designed to accept a range of shelf sizes[5]
Application focus—Changing needs of the flat panel industry[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]web.archive.orgweb.archive.org