Comparison ledger
Semitool 003163-000 SRD, SUSS MicroTec Delta 36 TA Wafer Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | Delta 36 TA Wafer MaskSUSS MicroTec |
|---|---|---|
| OEM | Semitool | SUSS MicroTec |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | SUSS MicroTec Delta 36 TA Wafer Mask |
| Specifications | ||
| Make | Semitool[1] | — |
| Model | 003163-000[1] | Delta 36 TA Wafer Mask[3] |
| Equipment type | Spin Rinse Dryer (SRD)[1] | Wafer Mask Cleaner[3] |
| Asset # | 139375[1] | — |
| Last Confirm Date | September 03, 2025[1] | — |
| Manufacturer | — | SUSS MicroTec[2] |
| Category | — | Wet Processing / Clean[2] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →