Waferpedia

Comparison ledger

11600 SRDversusMask

Semitool 11600 SRD, SUSS MicroTec Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
MaskSUSS MicroTec
OEMSemitoolSUSS MicroTec
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 11600 SRDSUSS MicroTec Mask
Specifications
ConfigurationCeramic[1]TXF from OLED[2]
ManufacturerSemitool[1]—
Model11600 SRD[1]Mask Cleaner[2]
Equipment typeSpin Rinse Dryer[1]—
Make—SUSS[2]
Category—Wet Processing / Clean[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing