Comparison ledger
Semitool ST 270 D SRD, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ST 270 D SRDSemitool | 1000FPYES |
|---|---|---|
| OEM | Semitool | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool ST 270 D SRD | YES 1000FP |
| Cited variants |
| — |
| Specifications | ||
| OEM | Semitool[2] | — |
| Model | ST 270 D[2] | Glen/YES 1000FP[3] |
| Equipment type | Spin Rinse Dryer (SRD)[2] | — |
| Wafer size | 5 inch[2] | — |
| System type | — | Plasma cleaning system[3] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[3] |
| Designed use | — | Designed to accept a range of shelf sizes[3] |
| Application focus | — | Changing needs of the flat panel industry[3] |
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