Waferpedia

Comparison ledger

300 ML Evergreen Series III Wafer Maskversus1000FP

SSEC 300 ML Evergreen Series III Wafer Mask, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMSSECYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySSEC 300 ML Evergreen Series III Wafer MaskYES 1000FP
Specifications
MakeSSEC[1]—
Model300 ML Evergreen Series III[1]Glen/YES 1000FP[2]
Equipment TypeWafer Mask Scrubber[1]—
System type—Plasma cleaning system[2]
Line—R-Series Plasma Cleaning Systems (Glen Technologies)[2]
Designed use—Designed to accept a range of shelf sizes[2]
Application focus—Changing needs of the flat panel industry[2]

Plan your fab

Building a Wet Processing / Clean process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]web.archive.orgweb.archive.org