Comparison ledger
Sumitomo SEN NV GSD HE Ion, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SEN NV GSD HE IonSumitomo | 160 XP IonVarian |
|---|---|---|
| OEM | Sumitomo | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Sumitomo SEN | Varian 160 XP Ion |
| Specifications | ||
| Voltage | 480 V[1] | — |
| Phase | 3 Phase[1] | — |
| Frequency | 60 Hz[1] | — |
| Power | 82 kVA[1] | — |
| Full Load Current | 99 A[1] | — |
| Input Breaker | 150 A[1] | — |
| Largest Load | 99 A[1] | — |
| Max Interrupt Capacity | 14 kA[1] | — |
| Configuration | 200 Volt[2] | 150mm High Current IMP[3] |
| Make | Sumitomo / SEN[1] | — |
| Model | NV GSD HE[1] | 160 XP Ion[4] |
| Wafer Sizes | 6 inch[2] | — |
| Vintage | 2000 Vintage[2] | — |
| Wafer Size | 6 inch[2] | — |
| OEM | — | Varian[4] |
| Category | — | Ion Implantation[3] |
| Tool type | — | ion implanter[3] |
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