Comparison ledger
Thermo Fisher Scientific FEI Sirion, Thermo Fisher Scientific FEI Sirion XL 30, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI SirionThermo Fisher | Scientific FEI Sirion XL 30Thermo Fisher |
|---|---|---|
| OEM | Thermo Fisher | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Thermo Fisher Scientific FEI Sirion | Thermo Fisher Scientific FEI Sirion |
| Specifications | ||
| Configuration | For Parts[1] | 50/60 Hz[2] |
| Type | Scanning Electron Microscope (SEM)[1] | — |
| Tall Cabinet | Gagne 1012[1] | — |
| Voltage | — | 230 V[2] |
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