Comparison ledger
Varian 0216 7696, E 11368072 ESC, Varian E 500 EHPI Ion Implant, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | E 500 EHPI Ion ImplantVarian | |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2000– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0216 7696, E 11368072 ESC | Varian E 500 EHPI Ion Implant |
| Specifications | ||
| Configuration | Platen ADV-S Type[1] | CE Mark[3] |
| Type | ESC Platen ADV-S Type[1] | — |
| Category | Ion Implantation[2] | — |
| Power | — | 208 V,50/60 Hz, 3 Phase[3] |
| Connection | — | Top[3] |
| Source 1 | — | IHC[3] |
| Extraction Electrode | — | EHP[3] |
| Bushing | — | EHP[3] |
| Wafer Size | — | 6 inch[3] |
| CE Mark | — | Yes[3] |
| Vintage | — | 2000[3] |
| Control Computer | — | Windows 7[3] |
| Software Version | — | V15.10.12[3] |
| Chuck system | — | ESC[3] |
| Computer | — | Win7[3] |
| Software | — | V15.10.12[3] |
| Source Turbo | — | Pfeiffer[3] |
| Analyzer Turbo | — | Pfeiffer[3] |
| Scanner Turbo | — | Pfeiffer[3] |
| LoadLock right | — | Cryo[3] |
| LoadLock left | — | Cryo[3] |
| Source/Terminal | — | Edwards Setup[3] |
| Differential Seal | — | Busch Scroll Fossa 15[3] |
| End station / Load Lock | — | Edwards Setup[3] |
| Cryo Comp | — | 9700A[3] |
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