Agilent E 500

Models in this family

1. E 500

   The Agilent / Varian E 500 is an 8-inch medium current ion implanter.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   E 500 EHPI	—	2003	Medium current ion implanter for 8-inch wafers.	waferpedia.com[1]

2. E 500 EHP

   The Agilent / Varian E 500 EHP is a medium-current ion implanter for 8-inch wafers.

3. E 500 EHPI

   The Agilent / Varian E 500 EHPI is a medium current ion implanter for 8-inch wafers from 2003.

Sources