Aixtron 2800 G 4 HT MOCVD Reactor

Models in this family

1. 

   2800 G 4 HT MOCVD Reactor

   The Aixtron 2800 G 4 HT MOCVD Reactor is a metal organic chemical vapor deposition system for InGaN MOCVD epitaxy on 6 x 6" wafers.