Waferpedia

Tool family

Aixtron G5HT

Aixtron1 entry

Models in this family

  1. The Aixtron G5HT is a metal-organic chemical vapor deposition (MOCVD) system for 6-inch wafer processing.

    Cited variants

    DesignationGenerationVintageChangesSource
    IC2 G5HT———auctions.thebranfordgroup.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]auctions.thebranfordgroup.comauctions.thebranfordgroup.com