The Applied Materials Centura 5200 DXZ is a 200 mm wafer CVD system offered in PECVD and SACVD configurations.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|
| Centura 5200 DxZ PECVD | — | — | PECVD process configuration | fabsurplus.com[1] |
| Centura 5200 DxZ SACVD | — | — | SACVD process, 3 chambers, TEOS chemistry | fabsurplus.com[2] |