Waferpedia

Tool family

Applied Materials Mirra Mesa

Models in this family

  1. Applied Materials Mirra Mesa is a CMP (Chemical Mechanical Polisher) with a 4-head, 3-platen polisher system module.

    Cited variants

    DesignationGenerationVintageChangesSource
    Mirra Mesa CMP 5201——CMP polisher for 8-inch wafers with oxide, dry-in/dry-out configuration.waferpedia.com[1]
  2. The Applied Materials Mirra Mesa CMP 5201 is a CMP polisher for 8-inch wafers with oxide, dry-in/dry-out configuration.

All entries

  1. Mirra MesaApplied Materials

    Applied Materials Mirra Mesa is a CMP (Chemical Mechanical Polisher) with a 4-head, 3-platen polisher system module.

    CategoryCMP
    44 specs
  2. Mirra Mesa CMP 5201Applied Materials

    The Applied Materials Mirra Mesa CMP 5201 is a CMP polisher for 8-inch wafers with oxide, dry-in/dry-out configuration.

    CategoryCMPWaferWafer loss sensor
    49 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com