ASML 5500 300 C

Models in this family

1. 

   5500 300 C

   The ASML PAS 5500/300C is a DUV stepper that processes up to 88 wafers per hour on 200 mm wafers and features the AERIAL illuminator for extendibility beyond 0.25 μm.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   PAS 5500/300C	DUV	—	Capable of processing 88 200 mm wafers per hour and incorporates an AERIAL Illuminator.	web.archive.org[1]

Sources