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Tool family

ASML 5500 350 C

ASMLLithography1 entry

ASML 5500 350 C Stepper.

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Models in this family

  1. 5500 350 C

    The ASML PAS 5500/350C is a DUV stepper for photolithography, typically used in a cluster with a TEL Clean Track ACT-8 coater/developer for 100 mm wafers. The system dates from 1997.

    Cited variants

    DesignationGenerationVintageChangesSource
    PAS 5500/350C———epfl.ch[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch