Waferpedia

Tool family

ASML TWINSCAN NXE:3100

ASMLLithography1 entry

The TWINSCAN NXE:3100 is a pre-production extreme ultraviolet (EUV) lithography system first shipped in 2010.

LinkedIn X Email

Models in this family

  1. TWINSCAN NXE:3100introduced 2010Pre-production

    The TWINSCAN NXE:3100 is a pre-production extreme ultraviolet (EUV) lithography system first shipped in 2010.