Tool family
ASML Twinscan XT 1700
Models in this family
The ASML Twinscan XT 1700 Fi ArF is a 300 mm ArF lithography scanner that uses a Cymer XLA 360 excimer laser and supports SMIF/FOUP wafer handling.
The ASML Twinscan XT 1700 i Immersion Scanner is a 193nm immersion lithography system described as being used for volume chip production at 45nm mode.
All entries
- Twinscan XT 1700 Fi ArFASML
The ASML Twinscan XT 1700 Fi ArF is a 300 mm ArF lithography scanner that uses a Cymer XLA 360 excimer laser and supports SMIF/FOUP wafer handling.
CategoryLithography5 specs - Twinscan XT 1700 i ImmersionASML
The ASML Twinscan XT 1700 i Immersion Scanner is a 193nm immersion lithography system described as being used for volume chip production at 45nm mode.
CategoryLithography8 specs