Waferpedia

Tool family

Axcelis NV 6200

AxcelisIon Implantation1 entry
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Models in this family

  1. NV 6200

    Cited variants

    DesignationGenerationVintageChangesSource
    NV 6200 A Ion———waferpedia.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com