Waferpedia

Tool family

Balzers Pfeiffer TPU

Balzers3 entries

Models in this family

  1. The Balzers Pfeiffer TPU 060 is a turbomolecular pump with a DN 63 CF flange, TL 011 operating agent, and 56 l/s volume flow rate.

  2. The Balzers Pfeiffer TPU 100 is a turbomolecular vacuum pump with a pumping speed of 110 l/s.

  3. Cited variants

    DesignationGenerationVintageChangesSource
    TPU 240Classic Line——labvac.com[1]

All entries

  1. Pfeiffer TPU 060 TurbomolecularBalzers

    The Balzers Pfeiffer TPU 060 is a turbomolecular pump with a DN 63 CF flange, TL 011 operating agent, and 56 l/s volume flow rate.

    3 specs
  2. Pfeiffer TPU 100 Turbomolecular VacuumBalzers

    The Balzers Pfeiffer TPU 100 is a turbomolecular vacuum pump with a pumping speed of 110 l/s.

    1 spec
  3. Pfeiffer TPU 240 TurbomolecularBalzers
    38 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]labvac.comlabvac.com