Waferpedia

Tool family

Blue M Drying

Blue MThermal / Diffusion1 entry
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Models in this family

  1. Drying

    Cited variants

    DesignationGenerationVintageChangesSource
    OV-8A Drying Oven———wiki.nanofab.usc.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]wiki.nanofab.usc.eduwiki.nanofab.usc.edu