Waferpedia

Tool family

Brooks ATM

Brooks4 entries
LinkedIn X Email

Models in this family

  1. ATM 204 207 Atmospheric Wafer Handling Robot

    The Brooks / PRI ATM 204 / 207 is an atmospheric wafer handling robot described as a single-arm unit.

  2. ATM 305 307 Atmospheric Wafer Handling Robot

    The Brooks / PRI ATM 305 / 307 is an atmospheric wafer handling robot described as a single-arm system.

  3. ATM 407 B 2 S CE S 293 Robot
  4. ATM ABM 105 107 107 B Atmospheric Wafer Handling Robot

    The Brooks / PRI ATM / ABM 105 / 107 / 107 B is an atmospheric wafer handling robot for 6 and 12 inch wafers, with a single-arm configuration.

All entries

  1. ATM 204 207 Atmospheric Wafer Handling RobotBrooks

    The Brooks / PRI ATM 204 / 207 is an atmospheric wafer handling robot described as a single-arm unit.

    CategoryLab & Support Equipment
    1 spec
  2. ATM 305 307 Atmospheric Wafer Handling RobotBrooks

    The Brooks / PRI ATM 305 / 307 is an atmospheric wafer handling robot described as a single-arm system.

    CategoryLab & Support Equipment
    1 spec
  3. ATM 407 B 2 S CE S 293 RobotBrooks
    16 specs
  4. ATM ABM 105 107 107 B Atmospheric Wafer Handling RobotBrooks

    The Brooks / PRI ATM / ABM 105 / 107 / 107 B is an atmospheric wafer handling robot for 6 and 12 inch wafers, with a single-arm configuration.

    6 specs