Waferpedia

Tool family

Brooks MTX 2000 Wafer

Brooks1 entry

Brooks MTX 2000 Wafer Sorter.

LinkedIn X Email

Models in this family

  1. MTX 2000 Wafer

    The Brooks MTX 2000 Wafer Sorter is a wafer sorting system that includes 2x Fixload V6, a Multiple IOSS Wafer ID Reader, 2x Brooks Robots, 2x Brooks Aligner, and a Greenlight Inspection Station.