Tool family
The Edwards iGX 100 M is a dry vacuum pump from the iGX series designed for semiconductor applications.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| iGX100M 200–230V | — | — | Voltage variant: 200–230 V, 50/60 Hz, part number A54612958 | idealvac.com[1] |
| iGX100M 380–460V | — | — | Voltage variant: 380–460 V, 50/60 Hz, part number A54612959 | idealvac.com[1] |
| iGX100M SS | — | — | Stainless steel construction, 200–230 V, 50/60 Hz, part number A53612958 | ptbsales.com[2] |
| iGX100MTI | — | — | Ti variant (specific differences not stated), 200–230 V, 50/60 Hz, part number A54648958 | idealvac.com[1] |