Waferpedia

Tool family

Espec HRS-800HS-25

Espec1 entry

The HRS-800HS-25 is a rapid-rate thermal cycle chamber with temperature and humidity control.

Models in this family

  1. The HRS-800HS-25 is a rapid-rate thermal cycle chamber with temperature and humidity control.

    Cited variants

    DesignationGenerationVintageChangesSource
    HRS-357HS-20——Interior dimensions 700x850x600 mm, 357 L, rate 20K/minespec.co.jp[1]
    HRS-600HS-20——Interior dimensions 1000x1000x600 mm, 600 L, rate 20K/minespec.co.jp[1]
    HRS-800HS-20——Interior dimensions 1000x1000x800 mm, 800 L, rate 20K/minespec.co.jp[1]
    HRS-1800HS-20——Interior dimensions 1500x1200x1000 mm, 1800 L, rate 20K/minespec.co.jp[1]
    HRS-357HS-25——Interior dimensions 700x850x600 mm, 357 L, rate 25K/minespec.co.jp[1]
    HRS-600HS-25——Interior dimensions 1000x1000x600 mm, 600 L, rate 25K/minespec.co.jp[1]
    HRS-1800HS-25——Interior dimensions 1500x1200x1000 mm, 1800 L, rate 25K/minespec.co.jp[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]espec.co.jpespec.co.jp