Waferpedia

Tool family

Hitachi TM 3030 Tabletop

Models in this family

  1. TM 3030 Tabletopproduced 2013–

    The Hitachi TM3030 is a compact tabletop scanning electron microscope (SEM) designed for high-magnification imaging of various samples with minimal preparation.

    Cited variants

    DesignationGenerationVintageChangesSource
    TM3030Plus—2014Added low-vacuum secondary electron detector; magnification increased to 60,000×unicam.hu[1]
    TM3030—2013Released in May 2013; improved image resolution and higher-resolution surface mode are stated for this variant.unicam.hu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]unicam.huunicam.hu