Waferpedia

Tool family

Keysight 5517

Models in this family

  1. The Keysight 5517A is a Class II helium-neon laser source providing stable 633 nm wavelength light for precision dual-frequency interferometry.

  2. The Keysight / Agilent 5517 B is an interferometer laser.

  3. The Keysight/Agilent 5517 C is a laser compatible with ASML PAS 5500 systems.

  4. The Keysight / Agilent 5517 C is a HeNe (helium-neon) laser with an Option C01 configuration.

    Cited variants

    DesignationGenerationVintageChangesSource
    5517 C (Option C01)—2006Includes option C01 as stated in the source.Equipment inventory listing[1]
  5. The Keysight / Agilent 5517 D is a laser compatible with the ASML PAS 5500 lithography system.

All entries

  1. 5517 AKeysight

    The Keysight 5517A is a Class II helium-neon laser source providing stable 633 nm wavelength light for precision dual-frequency interferometry.

    CategoryPrecision Optics
    15 specs
  2. 5517 BKeysight

    The Keysight / Agilent 5517 B is an interferometer laser.

    CategoryPrecision Optics
    1 spec
  3. 5517 CKeysight

    The Keysight/Agilent 5517 C is a laser compatible with ASML PAS 5500 systems.

    CategoryPrecision Optics
    5 specs
  4. 5517 C He-NeKeysight

    The Keysight / Agilent 5517 C is a HeNe (helium-neon) laser with an Option C01 configuration.

    CategoryPrecision Optics
    5 specs
  5. 5517 DKeysight

    The Keysight / Agilent 5517 D is a laser compatible with the ASML PAS 5500 lithography system.

    5 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing