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Tool family

KLA Candela 8520

KLAMetrology & Inspection2 entries
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Models in this family

  1. Candela 8520 Surface

    The KLA Candela 8520 Surface is a surface inspection system for wafer inspection on 6-inch and 8-inch wafers.

  2. Candela 8520 Wafer

    The KLA Candela 8520 Wafer is a wafer inspection system for 6-inch wafers.

All entries

  1. Candela 8520 SurfaceKLA

    The KLA Candela 8520 Surface is a surface inspection system for wafer inspection on 6-inch and 8-inch wafers.

    CategoryMetrology & Inspection
    13 specs
  2. Candela 8520 WaferKLA

    The KLA Candela 8520 Wafer is a wafer inspection system for 6-inch wafers.

    CategoryMetrology & InspectionWaferWafer Thickness 350μm ~ 1100μm
    45 specs