KLA Candela CS 20

Models in this family

1. 

   Candela CS 20
2. 

   Candela CS 20 R Dual Surface
3. 

   Candela CS 20 R Surface

   The KLA Candela CS 20 R is a surface inspection system stated to support 6-inch wafers.

4. 

   Candela CS 20 Surface

   The KLA Candela CS 20 Surface Inspection System is a 6-inch wafer surface inspection system.

5. 

   Candela CS 20 V

   KLA Candela CS 20 V is a metrology and inspection equipment model with source-stated wafer sizes of 4 inch and 6 inch.

6. 

   Candela CS 20 V Surface Analyzer

   The KLA Candela CS 20 V Surface Analyzer is a fully automatic surface measurement system using a 405 nm violet laser for film thickness analysis, particle detection, surface defect detection, and surface topography measurement.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Candela CS 20 V	—	—	—	Equipment inventory listing[1]

Sources