KLA Ergolux

Models in this family

1. Ergolux

   The KLA / Leica Ergolux is a microscope that supports 6-inch wafers and is classified under Metrology & Inspection.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Ergolux IM 11	—	—	—	waferpedia.com[1]

Sources