Tool family
The Lam 2300 Exelan Flex is a dielectric etch system for sub-90nm semiconductor manufacturing.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 2300 Exelan HP (High Productivity) | — | — | Uses 13.56MHz ICP source with 3000W max power; ideal for oxide etch at 90nm. May lack 60MHz ICP for low-k etch. | caladansemi.com[1] |
| Exelan Classic (pre-2005) | — | — | Pre-2005 variant; lacks sub-100nm uniformity. Avoid for sub-100nm nodes. | caladansemi.com[1] |