Waferpedia

Tool family

Nikon Scanner

NikonLithography2 entries

Models in this family

  1. The Nikon Scanner 203 B is a stepper/scanner from 1999, supporting 6-inch and 8-inch wafers with a 0.18um resolution.

  2. The Nikon Scanner 204 B is a Nikon-made lithography stepper that supports 6-inch and 8-inch wafers and is specified at 0.15 µm.

All entries

  1. Scanner 203 BNikon

    The Nikon Scanner 203 B is a stepper/scanner from 1999, supporting 6-inch and 8-inch wafers with a 0.18um resolution.

    CategoryLithography
    4 specs
  2. Scanner 204 BNikon

    The Nikon Scanner 204 B is a Nikon-made lithography stepper that supports 6-inch and 8-inch wafers and is specified at 0.15 µm.

    CategoryLithography
    8 specs