Tool family
The Optorun OTFC 1550 Optical is an optical coater or optical thin film coater in the OTFC series.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| OTFC-1550CBI/DBI | — | — | Vacuum chamber SUS304, φ1550mm×1800mm (H); substrate dome size φ1400mm; rotation speed 10 rpm to 30 rpm; HOM2-R-VIS350A optical monitor; XTC/3 plus 6-point rotary sensor; 2 EB sources; 17 cm RF ion source; roughing pump, 2 diffusion pumps plus Polycold or 2 cryo pumps plus cryo trap. | allwin21.com[1] |
| OTFC-900CBI/DBI | — | — | Vacuum chamber SUS304, φ900mm×1300mm (H); substrate dome size φ790mm; rotation speed 10 rpm to 30 rpm; HOM2-R-VIS350A optical monitor; XTC/3 plus 6-point rotary sensor; 2 EB sources; 10 cm RF ion source; mechanical pump plus 1 diffusion pump plus Polycold or 1 cryo pump. | optorun.sh.cn[2] |