Waferpedia

Tool family

Pfeiffer Hicube 80 Eco Turbo

Pfeiffer1 entry

Pfeiffer Hicube 80 Eco Turbo Pump.

Models in this family

  1. The Pfeiffer HiCube 80 Eco is a turbo pumping station that combines a HiPace 80 turbopump with a backing pump for creating high vacuum.

    Cited variants

    DesignationGenerationVintageChangesSource
    HiCube 80 Eco DN 63 ISO-K——Inlet flange DN 63 ISO-Knpl.washington.edu[1]
    HiCube 80 Eco DN 63 CF——Inlet flange DN 63 CFnpl.washington.edu[1]
    HiCube 80 Eco DN 40 ISO-KF——Inlet flange DN 40 ISO-KF, pumping speed for N₂ 35 l/shighvacdepot.com[2]
    HiCube 80 Eco DN 63 CF-F——DN 63 CF-F inlet flange; HiPace 80 turbopump; MVP 015-2 backing pump; DCU 002 control unit.npl.washington.edu[1]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]npl.washington.edunpl.washington.edu
  2. [2]highvacdepot.comhighvacdepot.com