Tool family

Plasma-Therm 790

Plasma-Therm 790 is listed as a PECVD tool in the UCSB Nanofab tool list, and a Plasma-Therm page states that the 790+ series are open-load etch and deposition systems.

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Models in this family

790
The Plasma-Therm 790 is a PECVD system used for thin film deposition.
Cited variants
Designation Generation Vintage Changes Source
790+ — — Predecessor to Advanced Vacuum Vision 300 and 400 open-load etch and deposition systems. web.archive.org^[1]

Designation	Generation	Vintage	Changes	Source
790+	—	—	Predecessor to Advanced Vacuum Vision 300 and 400 open-load etch and deposition systems.	web.archive.org^[1]

Sources

Sources (1)Every fact above is drawn from these public sources

[1]web.archive.orgweb.archive.org