PVA TePla GigaBatch

Models in this family

1. 

   GigaBatch

   The Tepla GiGAbatch is a high-frequency plasma tool used for photoresist stripping, wafer surface cleaning, and descumming before wet etching.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   GIGAbatch 360	—	—	Chamber diameter 245 mm, volume 18 l, depth 395 mm	pvatepla.com[1]
   GIGAbatch 380M	—	—	Chamber diameter 300 mm, volume 28 l, depth 395 mm	pvatepla.com[1]

Sources