Waferpedia

Tool family

SCREEN SU 3000

SCREENWet Processing / Clean1 entry

SCREEN SU 3000 Cleaner.

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Models in this family

  1. SU 3000

    The SCREEN / DNS SU 3000 is a cleaner stated with 12-inch wafer sizes.

    Cited variants

    DesignationGenerationVintageChangesSource
    SR Type—2004–2004Listed with SST, 3 load ports, and include HDD.Equipment inventory listing[1]
    MP Type——Listed with DHF and 2 load ports; some entries include HDD.Equipment inventory listing[2]
    SU-3100——Mentioned alongside SU-3000 as single-wafer equipment for bevel wet etching.patents.google.com[3]

Sources

Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]patents.google.compatents.google.com