Waferpedia

Tool family

Seiko Epson Seiki STP 1000 C Turbo

Seiko Epson1 entry

Models in this family

  1. The Seiko Seiki STP 1000 C Turbo is a turbo pump with a pumping speed of 1,000 l/s (N2), an ultimate pressure of 7.5 × 10⁻¹⁰ Torr, an ISO200K inlet, a KF40 exhaust, and a recommended controller of SCU-1000.