SUSS MicroTec ACS 200 Linear Wafer Tracks

Models in this family

1. ACS 200 Linear Wafer Tracks

   The SUSS ACS 200 Linear Wafer Tracks are resist coater/developer equipment described with a 6 inch wafer size.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   ACS200 Gen3	—	—	Described as a 200mm automated coater & developer for 100 mm to 200 mm wafers.	suss.com[1]

Sources