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Tool family

SUSS MicroTec DSC500

SUSS MicroTecLithography1 entry

The DSC500 is an automated, full-field scanning projection lithography system from SUSS MicroTec for substrates up to 450 x 500 mm.

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Models in this family

  1. DSC500

    The DSC500 is an automated, full-field scanning projection lithography system from SUSS MicroTec for substrates up to 450 x 500 mm.