Waferpedia

Tool family

Tegal i90X

TegalEtch1 entry

The Tegal i90X is described as a next-generation plasma etch system based on the 900 series platform.

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Models in this family

  1. i90X

    The Tegal i90X is a plasma etch system based on the production-proven Tegal 900-series platform, with unlimited recipes, 20X fine set-point control, and a Windows NT touchscreen control system.