Waferpedia

Tool family

Temescal Simba2

Temescal Simba2 is listed as a 15 kW power-supply upgrade option for the FC-4400, UEFC-5700, and FC/BCD-2800 deposition systems.

Models in this family

  1. The Temescal Simba2 is a 15-kW e-beam power supply offered as an upgrade option for several Temescal deposition systems.