Ulvac NE-550

Models in this family

1. 

   NE-550

   The Ulvac NE-550 is a multipurpose high-density, low-pressure plasma etching system used for chlorine etching.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   NE-550H	—	—	NE-550H is a multipurpose high-density plasma etching system, specifically for R&D test facilities such as universities and government agencies.	ulvac.eu[1]

Sources