Waferpedia

Tool family

Varian Kestrel 650

VarianIon Implantation1 entry
LinkedIn X Email

Models in this family

  1. Kestrel 650

    The Varian Kestrel 650 is an ion implanter for 200mm wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    Kestrel 650/750——The Kestrel 650/750 uses an ACCEL DRIVER (part number P15080708) and a Precision Dose Controller (part number 46485-00).solutions-on-silicon.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]solutions-on-silicon.comsolutions-on-silicon.com