Tool family
YES-3TA is a Vacuum Bake / Vapor Prime system in the YES Vacuum Bake/Vapor Prime product line, with capacity for 8 cassettes of 4-inch wafers or 1 cassette of 5-8 inch wafers.
YES-3TA is a Vacuum Bake / Vapor Prime system in the YES Vacuum Bake/Vapor Prime product line, with capacity for 8 cassettes of 4-inch wafers or 1 cassette of 5-8 inch wafers.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| YES-5TA | — | — | Specified for 8 cassettes of 5-6 inch wafers, or 2 cassettes of 8 inch wafers, or 1 cassette of 12 inch wafers. | web.archive.org[1] |
| YES-15 | — | — | Specified as an 'Ultra-Clean' system with capacity for 8 cassettes of 4 inch wafers, or 1 cassette of 5-8 inch wafers. | web.archive.org[1] |
| YES-6112 | — | — | Specified as an 'Ultra-Clean' system with capacity for 4 cassettes of 8 inch wafers. | web.archive.org[1] |