Waferpedia

Tool family

Zygo 6191-0460 XX 7701 Stage

Zygo1 entry

Zygo 6191-0460 XX 7701 Stage Laser.

Models in this family

  1. The Zygo 6191-0460 XX 7701 Stage is a stage laser compatible with Canon FPA 2500 and FPA 3000.