Accretech
Wafer size
Wafer Equipment
Optics
Type6[3]
The UF3000 is a fully automated prober and includes a loader, a chuck, and a test head manipulator.[3]
How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.
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The chuck temperature range is 30 to 150 degrees Celsius.[3]
Yes, the UF3000 supports automatic card change.[3]
The loader type is TSK.[3]
The software version is S5.0FC4.[3]
The following facts about the , Tokyo Semitsu Kogaku (TSK) UF3000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the , Tokyo Semitsu Kogaku (TSK) UF3000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the , Tokyo Semitsu Kogaku (TSK) UF3000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the , Tokyo Semitsu Kogaku (TSK) UF3000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the , Tokyo Semitsu Kogaku (TSK) UF3000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the , Tokyo Semitsu Kogaku (TSK) UF3000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Last updated Oct 7, 2026.
The Tokyo Semitsu Kogaku (TSK) UF200 is a production wafer prober configured for 200mm wafers.
The Lam SEZ203 is a Spinprocessor Typ 10 used for wet processing of semiconductor wafers.